Manufacturing method for mask
AssigneeSamsung Display Co., Ltd.
InventorsHwi Kim, Jeongkuk Kim, Seungyong Song, Areum Lee, Kyu Hwan Hwang
Life of this patent
Estimating the term…
Abstract
Provided is a mask manufacturing method including preparing a preliminary mask sheet including a first surface and a second surface facing each other, forming a mask support part including a concave part recessed from the first surface and a protrusion part adjacent to the concave part and protruding from the first surface by irradiating a first laser light to the first surface of the preliminary mask sheet, and forming an opening part adjacent to the protrusion part and penetrating the preliminary mask sheet by irradiating a second laser light on the second surface of the preliminary mask sheet.
Claims20
A mask manufacturing method comprising:
- preparing a preliminary mask sheet including a first surface and a second surface facing each other;
- forming a mask support part including a concave part recessed from the first surface and a protrusion part adjacent to the concave part and protruding from the first surface by irradiating a first laser light to the first surface of the preliminary mask sheet;
- where the concave part has a shape that is symmetrical with the protrusion part based on a lower surface of the mask sheet;
- and
- forming an opening part adjacent to the protrusion part and penetrating the preliminary mask sheet by irradiating a second laser light on the second surface of the preliminary mask sheet.
A mask manufacturing method using a laser processing device, comprising:
- providing a preliminary mask sheet including a first surface and a second surface facing each other on a stage;
- forming a mask support part including a concave part recessed from the first surface and a protrusion part adjacent to the concave part and protruding from the first surface by irradiating a first laser light to the first surface of the preliminary mask sheet while moving the stage in a first direction;
- where the concave part has a shape that is symmetrical with the protrusion part based on a lower surface of the mask sheet;
- and
- forming an opening part adjacent to the protrusion part and penetrating the preliminary mask sheet by irradiating a second laser light to the second surface of the preliminary mask sheet,
- wherein the laser processing device includes:
- a support part including the stage that is movable in the first direction and in a second direction orthogonal to the first direction, and
- a laser light providing part disposed on the support part.
Dependencies are inferred from the claim text.