Substrate processing apparatus and substrate processing system

A substrate processing apparatus provided in a clean room where a downflow is generated by a fan filter unit provided to a ceiling of the clean room, the substrate processing apparatus comprising:

• a processing chamber which is disposed in an downflow environment below the fan filter unit in the clean room, the processing chamber having a processing space capable of accommodating a substrate inside and being provided with an aperture on one side surface thereof, which communicates with the processing space to cause the substrate to pass therethrough;
• a lid part which closes and opens the aperture;
• a fluid supplier which supplies a heated processing fluid to be used for processing the substrate to the processing space closed by the lid part;
• an upper regulating plate which is disposed below the fan filter unit and includes a horizontal part and a vertical part, the horizontal part extending in a first direction, which is a horizontal direction from the one side surface to an other side surface of the processing chamber opposite to the one side surface, with a certain interval from an upper surface of the processing chamber, the vertical part extending downwardly from an end of the horizontal part in the first direction with a certain interval from the other side surface of the processing chamber;
• a lower regulating plate which is disposed between a floor of the clean room and a lower surface of the processing chamber with a certain interval from the lower surface of the processing chamber and extends along the first direction, wherein:
• the horizontal part and an upper end of the one side surface form an aperture extending along a second direction which is a horizontal direction perpendicular to the first direction;
• the lower regulating plate and a lower end of the one side surface form an aperture extending along the second direction;
• and
• the lower regulating plate and a lower end of the vertical part form an aperture having a slit-like shape and extending along the second direction.