Apparatus for supplying chemical liquid by automatic process and thereof

Abstract

The present disclosure relates to an apparatus and method for supplying a chemical liquid using an automated process. The apparatus includes: a drum washer unit configured to wash a drum keeping a chemical liquid; a drum shaker unit configured to mix a chemical liquid in a drum conveyed from the drum washer unit by rotating the drum; at least one chemical liquid ejector unit configured to eject a chemical liquid, which is kept in a drum conveyed from the drum shaker unit, to the outside using a dip tube; and a controller configured to perform control such that a drum finishes being used at the chemical liquid ejector unit is replaced with a new drum by operating at least one of the drum washer unit and the drum shaker unit for the new drum when the amount of a chemical liquid remaining in the drum at the chemical liquid ejector unit becomes a predetermined amount or less.

Dependencies are inferred from the claim text.