Contaminant removal device and contaminant removal method

A contaminant removal method for removing a contaminant attached to a surface of an object, the method comprising:

• providing a contaminant removal device including:
• a plurality of structures arranged in a length direction and a width direction, wherein the plurality of structures have a lower strength against a force applied from a predetermined direction, than against a force applied from a direction other than the predetermined direction
• a nozzle having a gas outlet formed by a plurality of aperture elements, wherein
• first aperture elements, from among the plurality of aperture elements, provided in opposing end portions of the gas outlet have smaller aperture areas than second aperture elements, from among the plurality of aperture elements, provided in a central portion of the gas outlet,
• an aperture ratio of each of the opposing end portions of the gas outlet is smaller than an aperture ratio of the central portion of the gas outlet, and
• the nozzle is disposed in an orientation in which a direction orthogonal to an opposing-end direction of the gas outlet is not matched with the predetermined direction;
• and
• spraying gas from the nozzle to remove the contaminant.

A contaminant removal device for removing a contaminant attached to an object, comprising:

• a nozzle provided with a gas outlet that sprays gas to remove the contaminant,
• wherein opposing end portions of the gas outlet have a smaller aperture ratio than that in a central portion of the gas outlet,
• wherein the mask includes a plurality of first closure plates that extend in a direction orthogonal to an opposing-end direction of the gas outlet, and that are installed in the opposing-end direction at equal intervals;
• and a plurality of second closure plates that extend in the opposing-end direction and that are installed between adjacent closure plates of the plurality of first closure plates, and
• a number of second closure plates installed between the adjacent plurality of first closure plates is greater on sides nearer to the opposing ends of the gas outlet.