Semiconductor device and method of manufacturing the same
AssigneeRenesas Electronics Corporation
InventorsKiyoshi Endo, Takashi Moriyama
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AssigneeRenesas Electronics Corporation
InventorsKiyoshi Endo, Takashi Moriyama
Estimating the term…
A semiconductor device includes a first element disposed in a first region and including a high-dielectric-constant insulating film, a second element disposed in a second region, and an element isolation portion disposed between the first region and the second region and electrically isolating between the first element and the second element. A step portion is formed on the surface of the element isolation portion. The semiconductor device further includes a dummy pattern that straddles the step portion. The dummy pattern includes a first high-dielectric-constant insulating film and a conductive film covering the upper surface of the first high-dielectric-constant insulating film. The first high-dielectric-constant insulating film is exposed from both side surfaces of the dummy pattern. The semiconductor device further includes a sidewall insulating film covering the first high-dielectric-constant insulating film exposed from both side surfaces of the dummy pattern.
A semiconductor device comprising:
Dependencies are inferred from the claim text.