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US 12,690,418 B2Granted
Apparatus for clamping a substrate on a mono-polar electrostatic chuck for deposition of photoresist films
AssigneeApplied Materials, Inc.
InventorsSushim Koshti, Vijay Parkhe, Nitin Bharadwaj Satyavolu, Venugopal Vellanki, Niranjana Balesan, Ashutosh Sawant
Life of this patent
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Abstract
Apparatuses for clamping a substrate on a mono-polar electrostatic chuck for deposition of photoresist films are disclosed. In an example, a lift-pin assembly includes a first metal spring, a first metal above and coupled to the first metal spring, a second metal spring above and coupled to the first metal, a second metal above and coupled to the second metal spring, and a ceramic above and coupled to the second metal.
Claims19
A lift-pin assembly, comprising:
- a first metal spring;
- a first metal above and coupled to the first metal spring;
- a ceramic above and coupled to the first metal;
- and
- a second metal spring above and coupled to the first metal, and a second metal above and coupled to the second metal spring, wherein the ceramic is above and coupled to the second metal.
2 more elements
A mono-polar electrostatic chuck, comprising:
- a chuck body;
- a plurality of lift-pin holes in the chuck body;
- and
- a plurality of lift-pins, individual ones of the plurality of lift-pins in corresponding ones of the plurality of lift-pin holes, wherein each of the plurality of lift-pins comprises:
- a first metal spring;
- a first metal above and coupled to the first metal spring;
- a second metal spring above and coupled to the first metal;
- a second metal above and coupled to the second metal spring;
- and
- a ceramic above and coupled to the second metal.
7 more elements
A system, comprising:
- a chamber;
- a plasma source within or coupled to the chamber;
- and
- a mono-polar electrostatic chuck within the chamber, the mono-polar electrostatic chuck comprising:
- a chuck body;
- a plurality of lift-pin holes in the chuck body;
- and
- a plurality of lift-pins, individual ones of the plurality of lift-pins in corresponding ones of the plurality of lift-pin holes, wherein each of the plurality of lift-pins comprises:
- a first metal spring;
- a first metal above and coupled to the first metal spring;
- a second metal spring above and coupled to the first metal;
- a second metal above and coupled to the second metal spring;
- and
- a ceramic above and coupled to the second metal.
11 more elements
Dependencies are inferred from the claim text.