Device and method for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or EUV lithography masks
AssigneeGsec German Semiconductor Equipment Company GmbH
InventorsGunter Haas, Jürgen Gutekunst, Frank Schienle
Life of this patent
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Abstract
A device for handling pot-shaped hollow bodies, more particularly transport containers for semiconductor wafers or for EUV lithography masks includes a wall, which encloses an inner space, a gripping and moving apparatus arranged in an inner space for moving the hollow body within the inner space and a wall opening which is formed by the wall, can be closed by a closure body and through which the inner space is accessible. The device includes a lid handling unit which can be detachably connected to the lid. The lid can be connected to the lid handling unit and is separated from the hollow body.
Claims12
A device for handling a hollow body having a pot-shape comprised of a transport container for semiconductor wafers or for EUV lithography masks, the device comprising:
- a wall that surrounds an inner space;
- a gripping and moving device arranged in the inner space for moving the hollow body within the inner space;
- and
- a wall opening that is formed by the wall, the wall opening being closable by a closure body, the inner space is accessible through the wall opening, the closure body being movably supported in the device by a fastening unit and having a reception section by which the hollow body is releasably connectable to the closure body, the hollow body includes a first gripping section on a first side wall and a second gripping section on an opposite second side wall, the reception section includes a locking device by which the closure body cooperates with the hollow body using the first gripping section, the gripping and moving device includes a gripping and releasing device by which the gripping and moving device cooperates with the hollow body using the second gripping section.
Dependencies are inferred from the claim text.