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US 12,690,218 B2Granted
Semiconductor structures and manufacturing methods thereof
AssigneeEnkris Semiconductor, Inc.
InventorsKai Cheng, Peng Xiang
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Abstract
The present disclosure provides a semiconductor structure and a manufacturing method thereof. The semiconductor structure includes: a semiconductor substrate, a back barrier layer, a channel layer and an etch stop layer arranged from bottom to up; and a P-type semiconductor layer located on a source region and a drain region of the etch stop layer.
Claims16
A semiconductor structure, comprising:
- a semiconductor substrate, a back barrier layer, a channel layer and an etch stop layer sequentially arranged from a bottom of the semiconductor structure to a top of the semiconductor structure, wherein a two-dimensional hole gas is formed at an interface between the back barrier layer and the channel layer, the etch stop layer is vertically above the two-dimensional hole gas;
- and
- a P-type semiconductor layer located in a source region and a drain region on the etch stop layer, wherein a P-type ion heavily doped layer is provided on the P-type semiconductor layer in the source region and the P-type semiconductor layer in the drain region.
A method of manufacturing a semiconductor substrate, comprising:
- providing a semiconductor substrate;
- forming a back barrier layer, a channel layer, an etch stop layer and a P-type semiconductor layer sequentially on the semiconductor substrate, wherein a two-dimensional hole gas is formed at an interface between the back barrier layer and the channel layer, the etch stop layer is vertically above the two-dimensional hole gas;
- removing the P-type semiconductor layer in a gate region by etching, retaining the P-type semiconductor layer in a source region and the P-type semiconductor layer in a drain region;
- and
- forming a P-type ion heavily doped layer respectively on the P-type semiconductor layer in the source region and the P-type semiconductor layer in the drain region.
2 more elements
Dependencies are inferred from the claim text.