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US 12,689,355 B2Granted
Bulk acoustic wave resonator with an integrated passive device fabricated using bump process
AssigneeTexas Instruments Incorporated
InventorsTing-Ta Yen, Yao Yu, Hassan Omar Ali
Life of this patent
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Abstract
A circuit includes a semiconductor substrate and an integrated passive device. The integrated passive device is on a surface of the semiconductor substrate. The integrated passive device is in a metal layer on the semiconductor substrate. The metal layer is at least tens of micrometers thick. The integrated passive device may be an inductor or a capacitor in some examples.
Claims20
A circuit, comprising:
- a semiconductor substrate;
- an inductor over the semiconductor substrate;
- a resonator on the semiconductor substrate, the resonator coupled in series with the inductor;
- and
- a seal ring over the semiconductor substrate and at least partially surrounding the inductor, the seal ring and the inductor made of a same material.
2 more elements
A circuit, comprising:
- a semiconductor substrate;
- a resonator over the semiconductor substrate;
- an inductor over the semiconductor substrate, in which the inductor is coupled in series to the resonator;
- and
- a seal ring over the semiconductor substrate, in which the seal ring at least partially laterally surrounds the inductor and the resonator.
2 more elements
A circuit, comprising:
- a first die including a semiconductor substrate;
- a first I/O terminal over the semiconductor substrate;
- a second I/O terminal over the semiconductor substrate;
- a passive device over the semiconductor substrate and includes a terminal coupled to the first I/O terminal;
- a seal ring that surrounds the passive device, the first I/O terminal, and the second I/O terminal, the seal ring having a same material as the passive device and the first and second I/O terminals;
- and
- a second die coupled to first I/O terminal and to the second I/O terminal, in which at least part of the passive device is spaced from at least one of the first or second dies.
4 more elements
Dependencies are inferred from the claim text.