Manufacturing method of conductive probe
AssigneeResonac Hard Disk Corporation
InventorMasaaki Yanagisawa
Life of this patent
Estimating the term…
Abstract
A manufacturing method of a conductive probe that is configured to write information to and read information from a ferroelectric recording medium is provided. The manufacturing method includes: forming, on a conductive material, an insulating layer by oxidizing the conductive material; forming an isolation layer on the insulating layer; applying a photoresist on the isolation layer; forming a hole in the photoresist; etching in the hole to the conductive material; depositing metal on a surface of the conductive material in the hole, thereby obtaining a needle-shaped electrode; and removing the isolation layer. A portion of the needle-shaped electrode protrudes from the surface of the insulating layer.
Claims2
A manufacturing method of a conductive probe that is configured to write information to and read information from a ferroelectric recording medium, the manufacturing method comprising:
- forming, on a conductive material, an insulating layer by oxidizing the conductive material;
- forming an isolation layer on the insulating layer;
- applying a photoresist on the isolation layer;
- forming a hole in the photoresist;
- etching in the hole to the conductive material;
- depositing metal on a surface of the conductive material in the hole, thereby obtaining a needle-shaped electrode;
- and
- removing the isolation layer,
- wherein a portion of the needle-shaped electrode protrudes from the surface of the insulating layer.
Dependencies are inferred from the claim text.