Chemical storage container management system for semiconductor process using short-range wireless communication

A chemical storage container management system for a semiconductor process, comprising:

• a chemical supply assembly supplying a chemical accommodated in a chemical storage container accommodating the chemical used for the semiconductor process to a region in which the semiconductor process is performed, and generating a plurality of information related to the chemical storage container;
• and
• a monitoring management unit receiving the plurality of information generated by the chemical supply assembly, and determining an operation situation of the chemical supply assembly,
• wherein the chemical supply assembly includes:
• a nozzle mounting unit provided detachably on the chemical storage container, and including a nozzle identification tag storing nozzle related information of the chemical storage container;
• a container settlement unit provided so as to settle the chemical storage container therein, and acquiring container settlement information indicating whether the chemical storage container is settled and container related information from a container identification tag pre-mounted on the chemical storage container through short-range wireless communication;
• and
• a nozzle information acquisition unit acquiring the nozzle related information from the nozzle identification tag and transmitting the nozzle related information to the container settlement unit through the short-range wireless communication.