Tool for modifying a support surface

A lithographic apparatus comprising:

• a holder having a plurality of support elements that are configured to support a substrate or a patterning device;
• and
• a material removing device configured to modify the support elements, the material removing device having a tool comprising:
• a circular main body having a main body surface, and
• multiple protrusions extending directly from the main body surface and provided along radial lines, wherein a radial line of some of the protrusions extends from, and is located on an opposite side of, a central portion of the circular main body as another radial line of some of the protrusions that also extends from the central portion and the protrusions are arranged not to be moved, during use, relative to the main body surface, each protrusion having a distal end and each of the distal ends of the protrusions not provided with an annular, annulus sector or circular surface,
• wherein the distal end of at least one of the protrusions comprises multiple projections, each of the projections being in the form of a line and distal ends of the projections configured to contact the support surfaces to modify the support elements.

An apparatus comprising:

• an article holder having a plurality of support elements, the support elements having support surfaces configured to support an article;
• and
• a material removing device configured to modify support elements of the article holder, the material removing device having a tool comprising:
• a circular main body having a main body surface, and
• multiple protrusions extending directly from the main body surface and provided along radial lines, wherein a radial line of some of the protrusions extends from, and is located on an opposite side of, a central portion of the circular main body as another radial line of some of the protrusions that also extends from the central portion and the protrusions are arranged not to be moved, during use, relative to the main body surface, each protrusion having a distal end and each of the distal ends of the protrusions not provided with an annular, annulus sector or circular surface,
• wherein the distal end of at least one of the protrusions comprises multiple projections, each of the projections being in the form of a line and distal ends of the projections configured to contact the support surfaces to modify the support elements.