Spatial light modulator, electronic apparatus including the spatial light modulator, and method of fabricating the spatial light modulator

A method of fabricating a spatial light modulator, the method comprising:

• sequentially forming, on a substrate, a void block layer, a lower reflective layer, a cavity layer, and an upper reflective layer,
• wherein the forming of the void block layer comprises:
• forming a sacrificial layer on the substrate;
• forming a plurality of through-holes exposing a surface of the substrate by etching the sacrificial layer;
• forming a plurality of pillars by filling the plurality of through-holes with a support material;
• and
• removing the sacrificial layer.

An electronic apparatus, comprising:

• a light source configured to emit light of a wavelength;
• and
• a spatial light modulator configured to modulate a phase of light incident from the light source and emit phase-modulated light,
• wherein the spatial light modulator comprises:
• a substrate;
• a plurality of pixels, each pixel of the plurality of pixels comprising:
• an upper reflective layer;
• a lower reflective layer;
• and
• a cavity layer disposed between the upper reflective layer and the lower reflective layer and having a refractive index that changes based on an electrical signal;
• and
• a void block layer comprising:
• a plurality of pillars supporting the plurality of pixels and separating the plurality of pixels from the substrate;
• and
• void regions formed between the substrate and the plurality of pixels.