Analysis apparatus, system, method, and program
AssigneeRigaku Corporation
InventorsRieko Suenaga, Yoshiyasu Ito
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AssigneeRigaku Corporation
InventorsRieko Suenaga, Yoshiyasu Ito
Estimating the term…
An analysis apparatus for calculating an index indicating an optimization degree of a model with respect to measurement data includes processing circuitry configured to calculate an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, acquire the measurement data, acquire calculation data calculated from the model, and calculate an index GOF including a ratio of a residual, which is defined by a predetermined mathematical formula including the measurement data and the calculation data, and an expected value of the residual, which is defined based on the probability distribution function and the predetermined mathematical formula.
An analysis apparatus for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:
An analysis apparatus for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:
A method for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known, comprising:
A non-transitory computer-readable storage medium storing computer-readable instructions thereon for calculating an index indicating an optimization degree of a model including information of an electron density distribution with respect to measurement data, a probability distribution function followed by the measurement data being known which, when executed by a computer, causes the computer to perform a method, the method comprising:
Dependencies are inferred from the claim text.