Pressure sensor package with a sensor die
AssigneeTE Connectivity Solutions GmbH
InventorsDavid Eric Wagner, Weijun (Davy) Xie, Vincent Wong
Life of this patent
Estimating the term…
Abstract
A sensor includes a housing having a body and a plurality of ports, a plurality of diaphragms each disposed in one of the ports, and a package having a substrate and a sensor die attached to the substrate. The body has a first face, an opposite second face, and a plurality of passageways extending through the body. The ports extend from the first face of the body. The substrate is attached to the second face of the body and the sensor die is disposed in a sealed containing space defined in part by the substrate. The substrate has a plurality of substrate passageways extending through the substrate. The passageways of the body include a plurality of first passageways that communicate with the substrate passageways.
Claims20
A sensor, comprising:
- a housing having a body and a plurality of ports, the body has a first face, an opposite second face, and a plurality of passageways extending through the body, the ports extend from the first face of the body;
- a plurality of diaphragms each disposed in one of the ports;
- and
- a package having a substrate and a sensor die attached to the substrate, the substrate is attached to the second face of the body and the sensor die is disposed in a sealed containing space defined in part by the substrate, the substrate has a plurality of substrate passageways extending through the substrate, the passageways of the body include a plurality of first passageways that communicate with the substrate passageways.
A sensor, comprising:
- a housing having a body and a plurality of ports, the body has a first face, an opposite second face, and a cavity extending into the second face, the ports extend from the first face of the body;
- a plurality of diaphragms each disposed in one of the ports;
- and
- a package having a substrate and a sensor die attached to the substrate, the substrate is attached to the second face of the body and the sensor die is disposed in a sealed containing space defined in part by the substrate, the substrate is attached to the second face over the cavity and the sealed containing space is defined by the substrate and the body.
A sensor, comprising:
- a housing having a body and a plurality of ports, the body has a first face and an opposite second face, the ports extend from the first face of the body;
- a plurality of diaphragms each disposed in one of the ports;
- and
- a package having a substrate and a sensor die attached to the substrate, the substrate is attached to the second face of the body and the sensor die is disposed in a sealed containing space defined in part by the substrate, the package has a plurality of sidewalls extending from the substrate to define the sealed containing space, and a gel is disposed in the sealed containing space around the sensor die.
Dependencies are inferred from the claim text.