Force and torque sensor with overload structure and method for manufacturing

A force/torque sensor comprising:

• an outer body structure;
• an inner body structure;
• three sensor structures, each sensor structure extending between the outer body structure and the inner body structure;
• and
• three overload structures, each overload structure being positioned between two of the three sensor structures;
• wherein each of the three overload structures includes an outer portion extending inwardly from the outer body structure, and an inner portion extending outwardly from the inner body structure, and
• wherein the outer portion of each overload structure has a plurality of outer facets including a first outer facet and a second outer facet, the inner portion has a plurality of corresponding opposing inner facets including a first inner facet and a second inner facet, the first inner facet corresponding to and opposing the first outer facet and the second inner facet corresponding to and opposite the second outer facet, and the plurality of outer facets and the plurality of inner facets are configured to permit a limited predetermined amount of relative motion between the inner body structure and the outer body structure in at least six degrees of freedom from a neutral position, and to inhibit relative motion between the inner body structure and the outer body structure beyond the predetermined amount, the first inner facet and the first outer facet limiting displacement of the inner body structure and the outer body structure in response to an external force in a positive direction along a Z axis of the force/torque sensor, the second inner facet and the second outer facet limiting displacement of the inner body structure and the outer body structure in response to an external force in a negative direction along the Z axis.