Spectroferometer
AssigneeLayer Metrics Inc.
InventorDominic Murphy
Life of this patent
Estimating the term…
Abstract
Spectroferometers and methods of use are provided. The spectroferometers includes an enclosure, one or more interferometer beam-splitting elements, and one or more spectrometer beam-dispersing elements. The one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements are housed in the enclosure, share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation, and each generate one or more optical outputs. The one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements.
Claims20
An apparatus comprising:
- an enclosure;
- one or more interferometer beam-splitting elements;
- and
- one or more spectrometer beam-dispersing elements,
- wherein the one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements:
- are housed in the enclosure;
- share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation;
- and
- each generate one or more optical outputs,
- wherein the one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements,
- wherein the one or more optical outputs of the one or more interferometer beam-splitting elements comprise two or more optical outputs configured to form an interference pattern on the one or more radiation sensitive elements, and
- wherein the one or more optical outputs of the one or more spectrometer beam-dispersing elements comprise one or more outputs configured to form a diffraction fringe pattern on the one or more radiation sensitive elements.
A method of analyzing electromagnetic radiation, comprising:
- providing an apparatus, including:
- an enclosure;
- a processor;
- a memory;
- one or more interferometer beam-splitting elements;
- and
- one or more spectrometer beam-dispersing elements,
- wherein the one or more interferometer beam-splitting elements and the one or more spectrometer beam-dispersing elements:
- are housed in the enclosure;
- share one or more radiation sensitive elements, which are arranged to generate a signal in response to incident electromagnetic radiation;
- and
- each generate one or more optical outputs,
- wherein the one or more optical outputs are arranged such that respective optical axes intersect substantially in a plane of the one or more radiation sensitive elements;
- processing, using the processor, one or more signals generated by the one or more radiation sensitive elements,
- wherein the one or more optical outputs of the one or more interferometer beam-splitting elements comprise two or more optical outputs configured to form an interference pattern on the one or more radiation sensitive elements, and
- wherein the one or more optical outputs of the one or more spectrometer beam-dispersing elements comprise one or more outputs configured to form a diffraction fringe pattern on the one or more radiation sensitive elements;
- and
- generating a spatial intensity profile of the incident electromagnetic radiation.
Dependencies are inferred from the claim text.