Movable coolant processing apparatus

A coolant system including a movable coolant processing apparatus detachably connected to a coolant circulation path for circulating a coolant between a substrate processor and a chiller, the coolant circulation path including a first path for supplying the coolant to the substrate processor from the chiller and a second path for returning the coolant to the chiller from the substrate processor, the movable coolant processing apparatus comprising:

• a housing;
• movers configured to move the housing;
• a first connector detachably connected to a first connection path branching from the first path;
• a second connector detachably connected to a second connection path branching from the second path;
• a pump disposed in the housing;
• a battery electrically connected to the pump;
• and
• a coolant tank disposed in the housing, wherein the coolant circulated between the substrate processor and the chiller is collected from the second path to the coolant tank through the second connection path and the second connector before maintenance of the substrate processor or the chiller, and then the collected coolant is refilled from the coolant tank to the first path through the first connection path and the first connector by the pump after the maintenance of the substrate processor or the chiller.