MEMS device

A micro-electromechanical system (MEMS) device, comprising:

• a substrate having a back cavity passing through the substrate;
• a diaphragm connected to the substrate and covers the back cavity, wherein the diaphragm comprises a first membrane and a second membrane arranged opposite to each other, and an accommodation space is formed between the first membrane and the second membrane;
• a counter electrode arranged in the accommodation space and comprising annular beams and first spokes, wherein the annular beams are successively arranged at intervals with an axis of the counter electrode as a center line, and the first spokes extend radially outward with the axis of the counter electrode as a starting point, an end of the first spokes is connected to the substrate, and two adjacent first spokes and two adjacent annular beams jointly form a first through hole;
• and
• a support arranged corresponding to the first through hole, and opposite ends of the support are respectively connected to the first membrane and the second membrane;
• the counter electrode further comprising second spokes extending along a radial direction of the diaphragm, and the second spokes arranged between adjacent first spokes, a starting point of the second spoke connected to one of the annular beams, and an end of the second spoke connected to the substrate, and the first spoke, the second spoke and two adjacent annular beams jointly forming a second through hole.