Liquid ejecting head and liquid ejecting apparatus

A liquid ejecting head comprising:

• a piezoelectric element that includes a first drive electrode, a second drive electrode, and a piezoelectric body, the piezoelectric body being provided between the first drive electrode and the second drive electrode in a lamination direction in which the first drive electrode, the second drive electrode, and the piezoelectric body are laminated;
• a vibration plate that is provided on a first side of the lamination direction with respect to the piezoelectric element and is deformed by driving of the piezoelectric element;
• a pressure chamber substrate that is provided on the first side of the lamination direction with respect to the vibration plate and is provided with a plurality of pressure chambers;
• a protective film that is disposed on a second side of the lamination direction with respect to the pressure chamber substrate and disposed on the piezoelectric body, the second side of the lamination direction being an opposite side to the first side of the lamination direction;
• and
• detection electrodes that include a first detection electrode in contact with the protective film and a second detection electrode in contact with the protective film at a position separated from the first detection electrode,
• wherein
• the first detection electrode is disposed on the first side of the lamination direction with respect to the protective film, and
• the second detection electrode is disposed on the second side of the lamination direction with respect to the protective film.

A liquid ejecting head comprising:

• a piezoelectric element that includes a first drive electrode, a second drive electrode, and a piezoelectric body, the piezoelectric body being provided between the first drive electrode and the second drive electrode in a lamination direction in which the first drive electrode, the second drive electrode, and the piezoelectric body are laminated;
• a vibration plate that is provided on a first side of the lamination direction with respect to the piezoelectric element and is deformed by driving of the piezoelectric element;
• a pressure chamber substrate that is provided on the first side of the lamination direction with respect to the vibration plate and is provided with a plurality of pressure chambers;
• a protective film that is disposed on a second side of the lamination direction with respect to the pressure chamber substrate and disposed on the piezoelectric body, the second side of the lamination direction being an opposite side to the first side of the lamination direction;
• and
• detection electrodes that include a first detection electrode in contact with the protective film and a second detection electrode in contact with the protective film at a position separated from the first detection electrode,
• wherein
• in plan view of the liquid ejecting head in the lamination direction, the plurality of pressure chambers are arranged in a first pressure chamber row along a first arrangement direction and in a second pressure chamber row along a second arrangement direction parallel to the first arrangement direction,
• a wiring substrate that is electrically coupled to the liquid ejecting head is disposed between the first pressure chamber row and the second pressure chamber row, and
• the protective film, the first detection electrode, and the second detection electrode are disposed on the pressure chamber substrate at positions adjacent to the wiring substrate along the first arrangement direction.