Roll-to-roll-imprinting
AssigneeTeknologian tutkimuskeskus VTT Oy
InventorsOlli-Heikki Huttunen, Jussi Hiltunen, Jarno Petäjä, Johanna Hiitola-Keinänen
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AssigneeTeknologian tutkimuskeskus VTT Oy
InventorsOlli-Heikki Huttunen, Jussi Hiltunen, Jarno Petäjä, Johanna Hiitola-Keinänen
Estimating the term…
The present invention relates to roll-to-roll surface patterning by imprint method. A film of liquid phase resist is coated on a running web and subsequently brought into contact with a rolling replication tool with patterned features on its outer surface. In a simultaneous step, resist is 5 cured typically by heat or UV-light and patterned features on the rolling replication tool are replicated into the resist film during the contact with the replication tool. A major deficiency of conventional roll-to-roll imprinting is the generation of defects in the patterns due to trapped air. To overcome this limitation, the present invention describes a method and 10 apparatus to perform roll-to-roll imprinting under reduced-pressure or vacuum conditions.
A roll-to-roll nanostructure manufacturing method comprising steps of:
Dependencies are inferred from the claim text.