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US 12,686,094 B2Granted
Method for manufacturing a glass wafer of high quality, glass wafer, glass part element, stack, augmented reality device and use
AssigneeSCHOTT Glass Technologies (Suzhou) Co. Ltd.
InventorsAlex Wang, Helen Fang, Zhengyang Lu, Clemens Ottermann, Stefan Weidlich
Life of this patent
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Abstract
A method for manufacturing a glass wafer for augmented reality applications includes the steps of: providing the raw wafer; edge-grinding of the raw wafer; lapping the raw wafer; rough polishing the raw wafer; fine polishing the raw wafer to obtain an intermediate wafer; gluing the intermediate wafer on a flat carrier; performing single-side polishing of a first main side of the intermediate wafer; and performing single-side polishing of a second main side of the intermediate wafer.
Claims16
A glass wafer, comprising:
- a first main surface;
- and
- a second main surface opposite the first main surface, a material of the glass wafer having a refractive index N,
- wherein, for each of a plurality of sub-domains of a maximal extension D of the glass wafer, the plurality of sub-domains are located within an effective domain of the glass wafer:
- from a thickness distribution of the glass wafer between the first main surface and the second main surface of a respective one of the plurality of sub-domains, a specific angle E is configured for being determined, wherein the specific angle F is determined as an angle of a planar contribution to a change in the thickness distribution;
- wherein the glass wafer has a maximal thickness of 2 mm or less,
- wherein the glass wafer has a specific thickness t,
- wherein the glass wafer is configured with respect to at least one parameter of the glass wafer such that for each of the plurality of sub-domains a local quality index LQI of the glass wafer is equal to or smaller than a threshold T, with the threshold T being defined as
- T
- =
- ε
- max
- D
- wherein εmax is 360 arcsec or less,
- wherein the local quality index LQI is defined as:
- LQI
- =
- ❘
- "\[LeftBracketingBar]"
- ε
- ❘
- "\[RightBracketingBar]"
- t
-
- N
- 2
- -
- 1
- .
26 more elements
Dependencies are inferred from the claim text.