Laser apparatus and control method
AssigneesShimadzu Corporation, Osaka University
InventorsMasahiro Tsukamoto, Yuji Sato, Keisuke Takenaka, Ritsuko Higashino, Koji Tojo
Life of this patent
Estimating the term…
Abstract
A laser apparatus includes six first laser devices that output respective blue laser beams for preliminary heating of an object, and a second laser device that outputs an infrared laser beam for main heating of the object. At least one of a relative positional relationship and each of respective first irradiation positions of the blue laser beams is changeable, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the six first laser beams in the object and a second irradiation position of the infrared laser beam in the object.
Claims14
A laser apparatus comprising:
- first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;
- a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;
- an input device that receives an input of an irradiation pattern from a user;
- and
- a controller, wherein
- the controller is configured to:
- control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating;
- and
- based on the irradiation pattern, change at least one of a relative positional relationship and the first irradiation positions of the first laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object.
A laser apparatus comprising:
- first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;
- a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;
- an input device that receives an input of an irradiation pattern from a user;
- and
- a controller, wherein
- the controller is configured to:
- control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating;
- and
- based on the irradiation pattern, change a relative positional relationship between the first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam.
A laser apparatus comprising:
- first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;
- second light sources that output respective second laser beams to perform main heating of respective second irradiation positions on the object;
- an input device that receives an input of an irradiation pattern from a user;
- and
- a controller, wherein
- the controller is configured to:
- control the second light sources to output the second laser beams to the second irradiation positions after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating;
- and
- based on the irradiation pattern, change at least one of a relative positional relationship and each of the respective second irradiation positions of the second laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the respective second irradiation positions of the second laser beams on the object.
A laser apparatus comprising:
- first light sources that output respective first laser beams to perform preliminary heating of respective first irradiation positions on an object;
- a second light source that outputs a second laser beam to perform main heating of a second irradiation position on the object;
- a first optical system that collects the first laser beams;
- a second optical system that collects the second laser beam;
- an input device that receives an input of an irradiation pattern from a user;
- and
- a controller,
- wherein the controller is configured to:
- control the second light source to output the second laser beam to the second irradiation position after a predetermined period of time has elapsed since outputting the first laser beams for the preliminary heating, and
- based on the irradiation pattern, change at least one of a relative positional relationship and the first irradiation positions of the first laser beams, the relative positional relationship being a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object, and
- wherein the first optical system and the second optical system are shifted from each other in a direction of an optical axis.
A control method for a laser apparatus that processes an object, the control method comprising:
- outputting first laser beams to perform preliminary heating of respective first irradiation positions on the object;
- outputting a second laser beam to perform main heating of a second irradiation position on the object;
- outputting the second laser beam to the second irradiation position, after a predetermined period of time has elapsed since outputting the first laser beam for the preliminary heating;
- inputting a first irradiation pattern;
- and
- based on the irradiation pattern, changing at least one of
- a relative positional relationship between the respective first irradiation positions of the first laser beams on the object and the second irradiation position of the second laser beam on the object, and
- the first irradiation positions.
Dependencies are inferred from the claim text.