Wire bonding systems and related methods of forming a vertical wire structure
AssigneeKulicke and Soffa Industries, Inc.
InventorsHui Xu, Jesse Parish, Gary S. Gillotti, Kam-Shing Wong, Basil Milton
Life of this patent
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Abstract
A wire bonding system is provided. The wire bonding system includes a bond head assembly configured to carry a wire bonding tool. The wire bonding system also includes a support structure configured to support a workpiece. The workpiece is configured for wire bonding. The wire bonding system also includes a movable stage assembly including a movable stage configured to move with respect to the wire bonding tool. The wire bonding tool is configured to press a wire engaged with the wire bonding tool against the movable stage to create a deformed portion of the wire.
Claims22
A wire bonding system comprising:
- a bond head assembly configured to carry a wire bonding tool, the bond head assembly including a first wire clamp, the wire bonding tool and the first wire clamp being configured to move together along a z-axis of the wire bonding system;
- a support structure configured to support a workpiece, the workpiece being configured for wire bonding;
- a movable stage assembly including a movable stage configured to move with respect to the wire bonding tool, the wire bonding tool being configured to press a wire engaged with the wire bonding tool against the movable stage to create a deformed portion of the wire, wherein an end portion of the wire extends from the deformed portion;
- and
- a second wire clamp, the second wire clamp being stationary with respect to the wire bonding tool and the first wire clamp along the z-axis,
- wherein the first wire clamp is configured to be closed and move downward along the z-axis, with the second wire clamp open, to advance the end portion of the wire prior to formation of the deformed portion of the wire,
- wherein the first wire clamp is configured to be open and move downward along the z-axis, with the second wire clamp closed, to at least partially straighten the end portion of the wire after formation of the deformed portion of the wire,
- wherein the movable stage is configured to move to a retracted position away from the wire bonding tool simultaneously with downward motion of the first wire clamp along the z-axis after formation of the deformed portion of the wire.
A method of forming a vertical wire structure on a wire bonding system, the method comprising the steps of:
- (a) providing an end portion of a wire below a tip of a wire bonding tool on the wire bonding system;
- (b) moving a movable stage with respect to the wire bonding tool;
- (c) pressing a portion of the wire adjacent to the end portion against the movable stage with the wire bonding tool to form a deformed portion of the wire;
- and
- (d) forming the vertical wire structure on a workpiece using the end portion of the wire.
Dependencies are inferred from the claim text.