Semiconductor waste gas treatment system and moisture-gas separator of the same
AssigneeHighlight Tech Corp.
InventorsTing Tsai, Zhi-Hao Chen, Shao-Qing Huang
Life of this patent
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AssigneeHighlight Tech Corp.
InventorsTing Tsai, Zhi-Hao Chen, Shao-Qing Huang
Estimating the term…
Disclosed are a semiconductor waste gas treatment system and a moisture-gas separator of the same. A moisture-gas separator is communicated between a wet scrubber and an air extraction device in the semiconductor waste gas treatment system. An air inlet pipe, a separation pipe and an exhaust pipe are communicated with one another in the moisture-gas separator. A diversion inclined partition is disposed obliquely in the separation pipe and a filter material layer filled in the separation pipe of the moisture-gas separator. The wet scrubber washes a process waste gas from a process waste gas source and discharges a scrubbed waste gas. The air extraction device provides a suction force so that the scrubbed waste gas first enters the separation pipe through the air inlet pipe, and is separated into water mist and dust, and then a dry waste gas is discharged through the exhaust pipe.
A moisture-gas separator applicable for longitudinal communication between a wet scrubber and an air extraction device, the moisture-gas separator at least comprising:
Dependencies are inferred from the claim text.