Contact for electronic component
AssigneeSTMicroelectronics (Rousset) SAS
InventorsChristian Rivero, Pascal Fornara
Life of this patent
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AssigneeSTMicroelectronics (Rousset) SAS
InventorsChristian Rivero, Pascal Fornara
Estimating the term…
A method of manufacturing a contact on a semiconductor region includes a step of forming a stack of layers on lateral walls and at a bottom of an orifice (aligned with the semiconductor region) crossing a dielectric region along a longitudinal direction. The step of forming step is carried out from a first surface of the dielectric region and includes forming a polysilicon layer and a layer of a first metal in contact with the polysilicon layer. The first metal is preferably a metal selected from the group of transition metals and is well suited to forming with the polysilicon layer a metal silicide. The method further includes a step of performing thermal anneal causing a reaction between the first metal and the polysilicon layer to produce a layer of metal silicide. At least a portion of that layer of metal silicide extends in the longitudinal direction of the orifice.
A method of manufacturing a contact on a semiconductor region of an electronic component, comprising:
A method of manufacturing a contact on a semiconductor region of an electronic component, comprising:
Dependencies are inferred from the claim text.