Magnetic sensor device, and method of producing same

A magnetic sensor device comprising:

• a first semiconductor substrate having an active surface comprising a processing circuit for processing sensor signals;
• a plurality of sensor substrates configured for providing a plurality of sensor signals, comprising at least:
• a second semiconductor substrate having an active surface comprising a first magnetic sensor configured for providing at least a first sensor signal, and a third semiconductor substrate having an active surface comprising a second magnetic sensor configured for providing at least a second sensor signal;
• wherein
• the sensor device is a wafer-level packaged device having a plurality of external terminals;
• the first substrate is situated at a location between the plurality of sensor substrates;
• the first semiconductor substrate is electrically connected to each of the sensor substrates by means of at least one redistribution layer;
• the first semiconductor substrate is electrically connected to the plurality of external terminals by means of said at least one redistribution layer;
• the processing circuit is configured for receiving said plurality of sensor signals or signals derived therefrom, and for determining at least one difference between said signals, and for providing an output signal derived from said at least one difference.