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US 12,685,024 B2Granted
Piezoelectric stack, piezoelectric element, and method of manufacturing piezoelectric stack
AssigneeSumitomo Chemical Company, Limited
InventorsToshiaki Kuroda, Kenji Shibata, Kazutoshi Watanabe, Takeshi Kimura
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Abstract
There is provided a piezoelectric stack, including: a substrate; an oxide film on the substrate, containing zinc and oxygen as main elements; an electrode film on the oxide film; and a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure.
Claims20
A piezoelectric stack comprising:
- a substrate;
- an oxide film on the substrate, containing zinc and oxygen as main elements;
- an electrode film on the oxide film;
- and
- a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure,
- wherein crystals constituting the oxide film are preferentially oriented in (0001) direction.
3 more elements
A piezoelectric element comprising:
- a substrate;
- an oxide film on the substrate, containing zinc and oxygen as main elements;
- a bottom electrode film on the oxide film;
- a piezoelectric film on the bottom electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure;
- and
- a top electrode film on the piezoelectric film,
- wherein crystals constituting the oxide film are preferentially oriented in (0001) direction.
4 more elements
A method of manufacturing a piezoelectric stack, comprising:
- depositing an oxide film on a substrate, containing zinc and oxygen as main elements;
- depositing an electrode film on the oxide film;
- and
- depositing a piezoelectric film on the electrode film, being an alkali niobium oxide film containing potassium, sodium, niobium, and oxygen and having a perovskite structure,
- wherein crystals constituting the deposited oxide film are preferentially oriented in (0001) direction.
2 more elements
Dependencies are inferred from the claim text.