Illumination device and inspection device

An illumination device comprising:

• a plurality of intermediate members each comprising
• a light source module comprising a substrate having a first surface, and a plurality of light sources configured to emit, on the first surface, light comprising first light and second light having luminance lower than luminance of the first light;
• and
• a light reflective member having a reflective surface configured to reflect light emitted from each of the plurality of light sources, wherein
• in each of the plurality of intermediate members,
• the reflective surface comprises a first reflective surface configured to reflect the first light and a second reflective surface configured to reflect the second light,
• the second reflective surface is located closer to the substrate than the first reflective surface is,
• of the light emitted from one light source of the plurality of light sources, the first light reflected by the first reflective surface and the second light reflected by the second reflective surface are condensed at a condensing point,
• the plurality of light sources are disposed in an arc shape, and
• the light emitted from the plurality of light sources is reflected by the reflective surface and travel towards an irradiation target, and
• the plurality of intermediate members are connected to each other.

An inspection device comprising:

• an illumination device;
• and
• an imaging device disposed apart from the illumination device and configured to image an inspection target irradiated with light emitted from the illumination device, wherein
• the illumination device comprises
• a light source module comprising a substrate having a first surface and a plurality of light sources arranged on the first surface, each of the plurality of light sources being configured to emit light comprising first light and second light having luminance lower than luminance of the first light;
• and
• a light reflective member configured to reflect the light emitted from each of the plurality of light sources,
• the reflective surface comprises a first reflective surface configured to reflect the first light and a second reflective surface configured to reflect the second light, and
• the second reflective surface is located closer to the substrate than the first reflective surface is.