Acoustic wave device including electrodes with different surface angles
AssigneeMurata Manufacturing Co., Ltd.
InventorMinefumi Ouchi
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric layer and a pair of electrodes. In a cross-section including first and second directions, at least one electrode of the pair of electrodes includes top, bottom, first side, and second side surfaces, the bottom surface being opposed to the top surface and closer to the piezoelectric layer than the top surface. A first angle between the first side surface and the first main surface is different from a second angle between the second side surface and the first main surface, and at least one of the first angle and the second angle is about 80° or larger.
Claims19
An acoustic wave device comprising:
- a piezoelectric layer including a first main surface, and a second main surface opposed to the first main surface and located in a first direction from the first main surface;
- and
- at least a pair of electrodes on the first main surface, facing each other in a second direction crossing the first direction, and adjacent to each other;
- wherein
- in a cross section including the first direction and the second direction, at least one electrode of the pair of electrodes includes a top surface, a bottom surface, a first side surface, and a second side surface, the bottom surface being opposed to the top surface and being closer to the piezoelectric layer than the top surface is;
- a first angle between the first side surface and the first main surface is different from a second angle between the second side surface and the first main surface;
- at least one of the first angle and the second angle is about 80° or larger;
- and
- the first angle is at an intersection of the first side surface and the first main surface, and the second angle is at an intersection of the second side surface and the first main surface.
Dependencies are inferred from the claim text.