Packaged acoustic wave devices with multi-layer piezoelectric substrate with seal ring spaced from piezoelectric layers
AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara, Takuya Ushiyama
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AssigneeSkyworks Solutions, Inc.
InventorsRei Goto, Hironori Fukuhara, Takuya Ushiyama
Estimating the term…
A packaged acoustic wave component has two acoustic wave devices interconnected by a thermally conductive frame, at least one of the acoustic wave devices including a multi-layer piezoelectric substrate. The multi-layer piezoelectric substrate includes a support layer and a piezoelectric layer disposed over the support layer. An interdigital transducer (IDT) electrode is disposed over the piezoelectric layer. The support layer has a high thermal conductivity, allowing heat generated by a first acoustic wave device with the multi-layer piezoelectric substrate to be transferred to a second acoustic wave device on which it is stacked to dissipate heat from the first acoustic wave device by way of the thermally conductive frame spaced from ends of the piezoelectric layers.
A packaged acoustic wave component comprising:
A radio frequency module comprising:
A wireless communication device comprising:
Dependencies are inferred from the claim text.