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US 12,683,574 B2Granted
Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorKatsuya Daimon
Life of this patent
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Abstract
An acoustic wave device includes an IDT electrode on a piezoelectric substrate and reflector electrodes on both sides of the IDT electrode in an acoustic wave propagation direction and each including electrode fingers with gaps therebetween, and first dielectric films between the reflector electrodes and the piezoelectric substrate in regions where the electrode fingers and the gaps of the reflector electrodes are provided.
Claims20
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer (IDT) electrode on the piezoelectric substrate;
- reflector electrodes on both sides of the IDT electrode in an acoustic wave propagation direction and including a plurality of electrode fingers with gaps therebetween;
- and
- a first dielectric film between the reflector electrodes and the piezoelectric substrate in regions where the plurality of electrode fingers and the gaps of the reflector electrodes are provided;
- wherein
- the first dielectric film is not provided between at least a portion of the IDT electrode and the piezoelectric substrate.
4 more elements
An acoustic wave device comprising:
- a piezoelectric substrate;
- an interdigital transducer (IDT) electrode on the piezoelectric substrate;
- reflector electrodes on both sides of the IDT electrode in an acoustic wave propagation direction and including a plurality of electrode fingers with gaps therebetween;
- and
- a first dielectric film between the plurality of electrode fingers of the reflector electrodes and the piezoelectric substrate and not provided in any portion of a region between the piezoelectric substrate and regions where the gaps of the reflector electrodes are provided.
2 more elements
Dependencies are inferred from the claim text.