Method for producing a cooling element, and cooling element produced using such a method

A method for manufacturing a cooling element (1) for a semiconductor element, the manufactured cooling element (1) having a cooling fluid channel system through which a cooling fluid can be passed in operation, comprising

• providing at least a first metal layer (11),
• realizing at least one recess (21, 22) in the at least one first metal layer (11), and
• forming at least a partial section of the cooling fluid channel system by means of the at least one recess (21, 22),
• wherein at least a first part (21) of the at least one recess (21, 22) in the at least one first metal layer (11) is realized by spark erosion, and
• wherein at least a second part (22) of the at least one recess (21, 22) in the at least one first metal layer (11) is realized by an etching, the etching to form the at least one second portion (22) of the at least one recess (21, 22) in the at least one first metal layer (11) occurs temporally prior to forming the at least one first portion (21) of the at least one recess (21, 22) in the at least one first metal layer (11) by the eroding.