Irradiation apparatus of electromagnetic waves
AssigneeITC Incorporated
InventorKeun Deok Lee
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Abstract
An electromagnetic wave irradiation apparatus includes a housing having a hollow portion formed inside and an open lower side; a coil-type antenna with a spiral shape in the hollow portion and configured to emit electromagnetic waves; a window coupled to the open lower side of the housing; and a capacitance variation measurement unit configured to measure a capacitance variation of the coil-type antenna. The electromagnetic wave irradiation apparatus may further include a cooling unit configured to cool at least one of the window or the housing. The capacitance variation measurement unit includes a capacitance sensor with one side connected to the coil-type antenna and the other side connected to the ground.
Claims10
An electromagnetic wave irradiation apparatus comprising:
- a housing having a hollow portion formed inside and an open lower side;
- a coil-type antenna with a spiral shape in the hollow portion and configured to emit electromagnetic waves;
- and
- a capacitance variation measurement unit configured to measure a capacitance variation of the coil-type antenna,
- wherein the capacitance variation measurement unit comprises a capacitance sensor with one side connected to the coil-type antenna and an other side connected to a ground, and
- wherein the ground connected to the capacitance sensor is different from a ground of a radio frequency (RF) oscillator configured to supply power to the coil-type antenna.
Dependencies are inferred from the claim text.