Computer, program, and charged particle beam processing system

A charged particle beam processing system comprising

• a computer;
• and a
• charged particle beam apparatus that comprises a charged particle irradiation optics,
• wherein the charged particle beam processing system comprises two or more charged particle beam apparatuses including a first charged particle beam apparatus of a first model and a second charged particle beam apparatus of a second model that is different from the first model;
• wherein the computer comprises:
• an information obtainer configured to obtain information about a recipe that is executed in the charged particle beam apparatus;
• an information manager configured to generate recipe management information based on the information obtained by the information obtainer and store the recipe management information in a storage;
• an information selector configured to select information based on the recipe management information;
• and
• a recipe assigner configured to assign a recipe to predetermined targets based on the information selected by the information selector, and
• wherein the charged particle beam apparatus comprises a recipe executor configured to execute processing of a recipe assigned by the computer,
• wherein the charged particle beam processing system performs workflow through coordination of the two or more charged particle beam apparatuses and,
• in the workflow, after the first charged particle beam apparatus executes processing of a first recipe to a sample, the second charged particle beam apparatus executes processing of a second recipe to the sample to which the processing of the first recipe has been executed;
• wherein the first charged particle beam apparatus, after executing processing of the first recipe, notifies the computer of first information about the processing;
• wherein the computer determines second information that is to be notified to the second charged particle beam apparatus based on the first information notified from the first charged beam apparatus and notifies the second charged beam apparatus of the second information that is determined;
• wherein the first information includes predetermined information about the sample mounted on a pillar in processing of the first recipe of the first charged particle beam apparatus;
• wherein the second information is information enabling determination of a position for executing processing of the second recipe that is subsequent to processing of the first recipe;
• and
• wherein the second charged particle beam apparatus determines the position based on the second information notified from the computer and executes processing or process of observation as processing of the second recipe.