Nanogranular magnetic film and electronic component
AssigneeTDK Corporation
InventorsHajime Amano, Kensuke Ara, Kazuhiro Yoshidome, Risako Tsurumaru
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Abstract
A nanogranular magnetic film includes a structure including first phases comprised of nano-domains dispersed in a second phase. The first phases include at least one selected from the group consisting of Fe, Co, and Ni. The second phase includes at least one selected from the group consisting of O, N, and F. A ratio of a volume of the first phases to a total volume of the first phases and the second phase is 65% or less. The nanogranular magnetic film has a porosity of 0.17 or more and 0.30 or less.
Claims5
A nanogranular magnetic film comprising a structure including first phases comprised of nano-domains dispersed in a second phase, wherein
- the first phases include at least one selected from the group consisting of Fe, Co, and Ni;
- the second phase is formed from a compound selected from the group consisting of:
- SiO2, Al2O3, AlN, ZnO, MgF2, SnO2, GaO2, GeO2, Si3N4·Al2O3, and any combination thereof;
- a ratio of a volume of the first phases to a total volume of the first phases and the second phase is 65% or less;
- and
- the nanogranular magnetic film has a porosity of 0.17 or more and 0.30 or less.
Dependencies are inferred from the claim text.