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US 12,683,044 B2Granted
Bush insert, bush assembly including the same and upper electrode assembling structure including the same
AssigneeHana Materials Inc.
InventorsJe Guen Yu, Yong Uk Kim, Je Hee Lee, Tae Gun Han, Eun Young Lee, Wang Ki Choi
Life of this patent
Estimating the term…
Abstract
A bush insert coupled to a plasma electrode plate is configured to provide an insert inner hole that passes through the bush insert in a first direction, an inner surface of the bush insert that defines the insert inner hole is configured to provide a female screw structure, and an outer surface of the bush insert has a non-circular shape in a plan view.
Claims17
A bush insert coupled to a plasma electrode plate,
- wherein the bush insert is configured to provide an insert inner hole that passes through the bush insert in a first direction,
- an inner surface of the bush insert that defines the insert inner hole is configured to provide a female screw structure, and
- an outer surface of the bush insert has a non-circular shape in a plan view,
- wherein the bush insert further comprises a shrinkage hole extending from the insert inner hole in a horizontal direction crossing the first direction and connected to the outer surface of the bush insert,
- wherein a length of the shrinkage hole in the first direction is less than a length of the insert inner hole in the first direction.
2 more elements
An upper electrode assembling structure comprising:
- a first electrode plate;
- and
- a bush assembly coupled to the first electrode plate,
- wherein the first electrode plate is configured to provide a first insertion hole that is recessed to a predetermined depth downward from a top surface of the first electrode plate, and
- the bush assembly comprises:
- a bush;
- and
- a bush insert coupled to the bush so as to surround the bush,
- wherein each of the first insertion hole and the bush insert has a rounded square shape in a plan view, and
- the bush insert is inserted into the first insertion hole.
7 more elements
A bush assembly comprising:
- a bush insert;
- and
- a bush inserted into the bush insert,
- wherein the bush is configured to provide an internal through-hole that passes through the bush in a first direction,
- a male screw structure is provided on an outer surface of the bush,
- the bush insert is configured to provide an insert inner hole that passes through the bush insert in the first direction,
- an inner surface of the bush insert that defines the insert inner hole is configured to a female screw structure engaged with the male screw structure,
- an outer surface of the bush insert has a non-circular shape in a plan view, and
- an outer surface of the bush has a circular shape in the plan view.
6 more elements
Dependencies are inferred from the claim text.