Measurement system, inspection system, measurement device, measurement method, inspection method, and program

A measurement apparatus for measuring a shape of at least a part of a measurement target, the measurement apparatus comprising:

• a first feature point data generator configured to generate first feature point data indicating a shape of a predetermined portion of the measurement target from first image data or from first shape data, the first image data being obtained from imaging of the measurement target and including the shape of the at least the part of the measurement target, the first shape data being generated based on the first image data;
• a second feature point data generator configured to generate second feature point data indicating the shape of the predetermined portion of the measurement target from second image data or from second shape data, the second image data including the shape of the at least the part of the measurement target and being obtained differently from the first image data, the second shape data being generated based on the second image data;
• a calculator configured to calculate a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data;
• and
• a merged shape data generator configured to merge at least parts of the first image data and the second image data or at least parts of the first shape data and the second shape data based on the positional correspondence of the predetermined portion of the measurement target calculated by the calculator, and to generate merged shape data of the predetermined portion of the measurement target,
• wherein the calculator includes an XY merging criterion generator and a Z merging criterion generator,
• wherein the XY merging criterion generator is configured to determine a correspondence of horizontal positions of the measured object and generate a horizontal merging criterion for the first shape data and the second shape data,
• wherein the Z merging criterion generator is configured to determine a correspondence of vertical positions of the measured object and generate a vertical merging criterion for the first shape data and the second shape data, and
• wherein
• the horizontal merging criterion is a transformation matrix that converts the first shape data into the second shape data, and
• the vertical merging criterion is a height scale factor that converts a height in the second shape data to a height in the first shape data.

A measurement method for measuring a shape of at least a part of a measurement target, the measurement method comprising:

• generating first feature point data indicating a shape of a predetermined portion of the measurement target from first image data or from first shape data, the first image data being obtained from imaging of the measurement target and including the shape of the at least the part of the measurement target, the first shape data being generated based on the first image data;
• generating second feature point data indicating the shape of the predetermined portion of the measurement target from second image data or from second shape data, the second image data including the shape of the at least the part of the measurement target and being obtained differently from the first image data, the second shape data being generated based on the second image data;
• calculating a positional correspondence of the predetermined portion of the measurement target between the first image data and the second image data or between the first shape data and the second shape data based on the first feature point data and the second feature point data;
• merging at least parts of the first image data and the second image data or at least parts of the first shape data and the second shape data based on the calculated positional correspondence of the predetermined portion of the measurement target;
• and
• generating merged shape data of the predetermined portion of the measurement target,
• wherein calculating the positional correspondence includes determining a correspondence of horizontal positions of the measured object and generating a horizontal merging criterion for the first shape data and the second shape data, and determining a correspondence of vertical positions of the measured object and generating a vertical merging criterion for the first shape data and the second shape data, and
• wherein
• the horizontal merging criterion is a transformation matrix that converts the first shape data into the second shape data, and
• the vertical merging criterion is a height scale factor that converts a height in the second shape data to a height in the first shape data.