Cyclic exposure scanning system having distributed multi-lens and method thereof

A cyclic exposure scanning system having distributed multi-lens comprising:

• a processor configured to perform computations according to a first optical pattern and a second optical pattern and output a corresponding control command;
• a platform configured to carry a substrate, wherein the platform moves according to the control command;
• an optical engine configured to project a corresponding first optical image and a corresponding second optical image according to the control command;
• a first optical imaging device configured to project the first optical image onto a first exposure area of the substrate;
• a second optical imaging device configured to project the second optical image onto a second exposure area of the substrate;
• and
• a light guide structure configured to guide the first optical image to the first optical imaging device and guide the second optical image to the second optical imaging device according to the control command;
• wherein during a first time interval within a cycle time, the control command directs the optical engine to project the first optical image, the first image is guided by the light guiding structure to the first optical imaging device, the first optical imaging device receives and projects the first optical image onto the first exposure area, during a second time interval within the cycle time, the control command directs the optical engine to project the second optical image, the second image is guided by the light guiding structure to the second optical imaging device, the second optical imaging device receives and projects the second optical image onto the second exposure area.