Active device substrate

An active device substrate, comprising:

• a substrate;
• an active device, disposed on the substrate;
• and
• an electrode, electrically connected to the active device and comprising:
• a first light shielding conductive pattern;
• a second light shielding conductive pattern;
• a third light shielding conductive pattern, wherein the first light shielding conductive pattern, the second light shielding conductive pattern, and the third light shielding conductive pattern are sequentially stacked to form a conductive stack;
• and
• a first metal oxide protection pattern, having an opening, wherein the conductive stack is disposed in the opening, the first metal oxide protection pattern comprises a first portion, a second portion, and a third portion, the first portion, the second portion, and the third portion of the first metal oxide protection pattern respectively contact a sidewall of the first light shielding conductive pattern, a sidewall of the second light shielding conductive pattern, and a sidewall of the third light shielding conductive pattern, and a material of the first portion, a material of the second portion, and a material of the third portion of the first metal oxide protection pattern are identical;
• and
• an insulation layer, disposed between the electrode and the active device and having a contact window, wherein the electrode is disposed on the insulation layer, and one portion of the electrode fills the contact window of the insulation layer, so as to be electrically connected to the active device, the insulation layer comprising:
• a thick portion, overlapped with the conductive stack and the first metal oxide protection pattern;
• and
• a thin portion, located outside an area occupied by the conductive stack and the first metal oxide protection pattern.