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US 12,681,342 B2Granted
Waveguide line electrode structure and electro-optic modulator
AssigneeNanjing Lycore Technologies Co., Ltd.
InventorsHanxiao Liang, Yipin Song, Yingcong Zhou, Haicang Wu, Wenhao Mao, Shiwei Song, Weiqi Sun, Qingyang Yu
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Abstract
A waveguide line electrode structure is provided. The waveguide line electrode structure includes a first ground electrode, a signal electrode and a second ground electrode that are sequentially arranged spaced apart from each other; an optical waveguide including a first branch and a second branch; a first covering layer; a second covering layer and at least one electrode extension portion.
Claims18
A waveguide line electrode structure, comprising:
- a first ground electrode, a signal electrode, and a second ground electrode, wherein the first ground electrode, the signal electrode, and the second ground electrode are sequentially arranged spaced apart from each other;
- an optical waveguide comprising a first branch and a second branch, the first branch being arranged in a first gap formed between the first ground electrode and the signal electrode, and the second branch being arranged in a second gap formed between the second ground electrode and the signal electrode;
- a first covering layer at least partially covering the first branch;
- a second covering layer at least partially covering the second branch;
- and
- at least one electrode extension portion, wherein each electrode extension portion extends from a first side of the signal electrode facing the first ground electrode, a second side of the signal electrode facing the second ground electrode, a third side of the first ground electrode facing the signal electrode or a fourth side of the second ground electrode facing the signal electrode to the first gap or the second gap adjacent to the signal electrode, and each electrode extension portion extends to an upper surface of the first covering layer or the second covering layer,
- wherein the upper surface of at least one of the first covering layer or the second covering layer comprises at least one inclined section, each inclined section extending obliquely upward in a direction from the signal electrode, the first ground electrode, or the second ground electrode toward the first branch or the second branch adjacent to the signal electrode,
- wherein only corresponding portions of the at least one electrode extension portion are configured to directly contact the first covering layer or the second covering layer, and the first ground electrode, the signal electrode, and the second ground electrode are not in direct contact with the first covering layer or the second covering layer.
5 more elements
An electro-optic modulator, comprising:
- a substrate;
- an isolation layer arranged on an upper surface of the substrate;
- a thin film layer arranged on an upper surface of the isolation layer, the thin film layer being made of a photoelectric material;
- a waveguide line electrode structure, wherein the waveguide line electrode structure is arranged on an upper surface of the thin film layer and wherein the waveguide line electrode structure comprises:
- a first ground electrode, a signal electrode, and a second ground electrode, wherein the first ground electrode, the signal electrode, and the second ground electrode are sequentially arranged spaced apart from each other;
- an optical waveguide comprising a first branch and a second branch, the first branch being arranged in a first gap formed between the first ground electrode and the signal electrode, and the second branch being arranged in a second gap formed between the second ground electrode and the signal electrode;
- a first covering layer at least partially covering the first branch;
- a second covering layer at least partially covering the second branch;
- and
- at least one electrode extension portion, wherein each electrode extension portion extends from a first side of the signal electrode facing the first ground electrode, a second side of the signal electrode facing the second ground electrode, a third side of the first ground electrode facing the signal electrode or a fourth side of the second ground electrode facing the signal electrode to the first gap or the second gap adjacent to the signal electrode, and each electrode extension portion extends to an upper surface of the first covering layer or the second covering layer,
- wherein the upper surface of at least one of the first covering layer or the second covering layer comprises at least one inclined section, each inclined section extending obliquely upward in a direction from the signal electrode, the first ground electrode or the second ground electrode toward the first branch or the second branch adjacent to the signal electrode,
- wherein only corresponding portions of the at least one electrode extension portion are configured to directly contact the first covering layer or the second covering layer, and the first ground electrode, the signal electrode, and the second ground electrode are not in direct contact with the first covering layer or the second covering layer;
- and
- an optical assembly arranged on the upper surface of the thin film layer and configured to:
- split light propagating in the optical waveguide into light in the first branch and light in the second branch, and
- combine the light in the first branch and the light in the second branch into the light propagating in the optical waveguide again.
13 more elements
Dependencies are inferred from the claim text.