Back to results
US 12,681,338 B2Granted
Electro-optical device
AssigneeTDK Corporation
InventorsKenji Nagase, Hiroshi Take, Shingo Miyata
Life of this patent
Estimating the term…
Abstract
An electro-optical device, including: a substrate; an optical waveguide composed of an electro-optic material film formed in a ridge shape on the substrate; a buffer layer configured to cover the optical waveguide; and an upper electrode provided on the optical waveguide through the buffer layer, and the buffer layer has a recess on the upper electrode side above the optical waveguide. Accordingly, the propagation loss of light can be suppressed.
Claims10
An electro-optical device comprising:
- a substrate;
- an optical waveguide composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the optical waveguide;
- and
- an upper electrode provided on the optical waveguide through the buffer layer,
- wherein:
- the buffer layer has a curved recess that is bent toward the optical waveguide, and the upper electrode is provided on the curved recess of the buffer layer,
- a width of the upper electrode is smaller than a width of the curved recess of the buffer layer,
- the buffer layer contacts an entire upper surface of a layer of the optical waveguide, and
- an upper surface of the buffer layer outside the curved recess is entirely a flat surface.
7 more elements
An electro-optical device comprising:
- a substrate;
- first and second optical waveguides adjacent to each other, composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the first and second optical waveguides and to be buried between the first and second optical waveguides;
- and
- first and second electrodes arranged to be opposite to the first and second optical waveguides above the buffer layer,
- wherein:
- the buffer layer has one or more curved recesses that are bent toward the first and second optical waveguides, and the first and second electrodes are provided on the one or more curved recesses of the buffer layer,
- a width of the first and second electrodes is smaller than a width of the one or more curved recesses, and
- the buffer layer provided between the first and second optical waveguides comprises a first buffer layer and a second buffer layer, each of which has a respective curved recess bent toward the first and second optical waveguides and covering the first and second optical waveguides as a whole, above the first and second optical waveguides.
6 more elements
An electro-optical device comprising:
- a substrate;
- first and second optical waveguides adjacent to each other, composed of an electro-optic material film formed in a ridge shape on the substrate;
- a buffer layer configured to cover the first and second optical waveguides and to be buried between the first and second optical waveguides;
- and
- first and second electrodes arranged to be opposite to the first and second optical waveguides above the buffer layer,
- wherein:
- the buffer layer has one curved recess that is bent toward the first and second optical waveguides, and the first and second electrodes are provided on the one curved recess of the buffer layer, and
- the one curved recess provided in the buffer layer covers the first and second optical waveguides as a whole as well as a portion of the buffer layer between the first and second optical waveguides, with the first and second electrodes being provided on the one curved recess.
5 more elements
Dependencies are inferred from the claim text.