Axisymmetric heating assembly layout with double ended lamp

A lamp module suitable for semiconductor substrate processing, comprising:

• a reflector body;
• one or more first grooves disposed within a first surface of the reflector body, each of the first grooves configured to receive one or more linear lamps;
• one or more second grooves disposed within the first surface of the reflector body, each of the second grooves configured to receive one or more linear lamps;
• one or more third grooves disposed within the first surface of the reflector body;
• and
• one or more fourth grooves disposed within the first surface of the reflector body, wherein,
• the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring while the one or more third grooves and the one or more fourth grooves are oriented to form at least a portion of a second ring circumscribing the first ring,
• wherein the one or more first grooves has a different cross sectional shape than the one or more second grooves,
• wherein each of the one or more first grooves and each of the one or more second grooves comprises a plurality of individual grooves arranged along an arc about a central axis,
• wherein each individual groove extends along a curved length of less than 180 degrees about the central axis, and
• wherein each individual groove includes at least two holes passing from a groove wall to a second surface of the reflector body opposite the first surface, the at least two holes being located at proximate distal ends of the individual groove.

A lamp module suitable for semiconductor substrate processing, comprising:

• a reflector body;
• one or more first grooves disposed within a first surface of the reflector body;
• one or more second grooves disposed within the first surface of the reflector body;
• one or more third grooves disposed within the first surface of the reflector body;
• and
• one or more fourth grooves disposed within the first surface of the reflector body, wherein,
• the one or more first grooves and the one or more second grooves are oriented to form at least a portion of a first ring, the one or more third grooves and the one or more fourth grooves oriented to form at least a portion of a second ring circumscribing the first ring, and the one or more first grooves having a different cross sectional shape than the one or more second grooves,
• wherein each of the one or more first grooves and the one or more second grooves is a curved groove extending along an arc of less than 180 degrees about a central axis.