Sensor module

A sensor module comprising:

• one or more physical quantity sensors;
• one or more count units;
• one or more time digital value generation units;
• one or more combined output value generation units;
• one or more storage units;
• and
• a reference periodic signal generation unit configured to output a reference periodic signal, wherein
• the m-th physical quantity sensor is configured to output an m-th measurement target signal whose frequency changes according to a magnitude of a detected m-th physical quantity,
• the m-th count unit is configured to count a time event of one of the m-th measurement target signal and the reference periodic signal in synchronization with the other of the m-th measurement target signal and the reference periodic signal to generate first to n-th count values in time series, n being an integer of 2 or more,
• the m-th time digital value generation unit is configured to generate first to n-th time digital values, each of which is based on a phase difference between the m-th measurement target signal and the reference periodic signal, in time series,
• the m-th combined output value generation unit is configured to generate an i-th combined output value based on the i-th time digital value generated by the m-th time digital value generation unit and the i-th count value generated by the m-th count unit, i being an integer wherein 1≤i≤n, wherein the combined output value satisfies a property of a delta-sigma modulation signal to obtain a noise shaping effect,
• the m-th storage unit is configured to store p continuous combined output values among the first to n-th combined output values generated by the m-th combined output value generation unit, and the stored p combined output values are output based on a control signal,
• a quantization error of the j-th combined output value generated by the m-th combined output value generation unit is fed back to generation of the (j+1)-th combined output value, j being an integer wherein 1≤j≤n−1, and
• a period of a change of the m-th physical quantity, when a frequency at which the detectable m-th physical quantity changes is a maximum frequency in a frequency band, is longer than eight times an average period in which the first to n-th combined output values are generated by the m-th combined output value generation unit, m being an integer of 1 or more.