Physical quantity sensor and inertial measurement unit

A physical quantity sensor comprising:

• when directions orthogonal to one another are a first direction, a second direction, and a third direction,
• a fixed portion fixed to a base body, the fixed portion extending along the first direction;
• a support beam having one end coupled to the fixed portion and extending along the first direction;
• a fixed electrode portion provided at the base body;
• and
• a movable body, wherein
• the fixed electrode portion includes
• a first pedestal provided at the base body,
• a first fixed electrode group including a plurality of first fixed electrodes that extend from the first pedestal along the second direction,
• a second pedestal provided at the base body,
• a second fixed electrode group including a plurality of second fixed electrodes that extend from the second pedestal along the second direction,
• a third pedestal provided at the base body,
• a third fixed electrode group including a plurality of third fixed electrodes that extend from the third pedestal along the second direction,
• a fourth pedestal provided at the base body, and
• a fourth fixed electrode group including a plurality of fourth fixed electrodes that extend from the fourth pedestal along the second direction,
• the movable body includes a movable electrode portion,
• the movable electrode portion includes
• a first movable electrode group including a plurality of first movable electrodes respectively facing the plurality of first fixed in the first direction,
• a second movable electrode group including a plurality of second movable electrodes respectively facing the plurality of second fixed electrodes in the first direction,
• a third movable electrode group including a plurality of third movable electrodes respectively facing the plurality of third fixed electrodes in the first direction, and
• a fourth movable electrode group including a plurality of fourth movable electrodes respectively facing the plurality of fourth fixed electrodes in the first direction,
• the first movable electrode group, the second movable electrode group, the third movable electrode group, and the fourth movable electrode group are arranged in this order along the first direction,
• a thickness along the third direction of each of the plurality of second movable electrodes is different from a thickness along the third direction of each of the plurality of first movable electrodes,
• a thickness along the third direction of each of the plurality of third movable electrodes is different from a thickness along the third direction of each of the plurality of fourth movable electrodes,
• when an imaginary line extending in the second direction from a center of the fixed portion is an axis of symmetry, the first movable electrode group is disposed line-symmetrically with the fourth movable electrode group, and the second movable electrode group is disposed line-symmetrically with the third movable electrode group,
• the fixed portion aligns with the second and third pedestals along the second direction,
• a damper is configured to damp a rotational vibration of the movable body about the third direction as a rotation axis,
• the damper is configured with fixed comb teeth and movable comb teeth that face each other along the first direction,
• the movable comb teeth are connected to the movable body, and the fixed comb teeth are fixed to the base body, and
• the fixed comb teeth extend along the second direction, and the movable comb teeth extend along the second direction.