Translational mass accelerometer
AssigneeHoneywell International Inc.
InventorsPaul W. Dwyer, Stephen F. Becka
Life of this patent
Estimating the term…
Abstract
An example Micro Electro-Mechanical Systems (MEMS) accelerometer device includes a proof mass comprising at least one of one or more isolated conductive coil traces or one or more pick-off combs within the proof mass, the one or more pick-off combs comprising a plurality of pick-off comb tines; a pole-piece layer coupled to the proof mass; and a return-path layer coupled to the proof mass, wherein the at least one of the one or more isolated conductive coil traces or the one or more pick-off combs are formed by selective laser etching.
Claims20
A Micro Electro-Mechanical Systems (MEMS) accelerometer device comprising:
- a proof mass comprising at least one of one or more isolated conductive coil traces or one or more pick-off combs within the proof mass, the one or more pick-off combs comprising a plurality of pick-off comb tines;
- a pole-piece layer coupled to the proof mass;
- and
- a return-path layer coupled to the proof mass,
- wherein the at least one of the one or more isolated conductive coil traces or the one or more pick-off combs are formed by selective laser etching.
A method comprising:
- selective laser etching one or more isolated conductive coil traces within a proof mass;
- and
- selective laser etching one or more pick-off combs within the proof mass, the one or more pick-off combs comprising a plurality of pick-off comb tines.
Dependencies are inferred from the claim text.