Photodetector and beating spectroscopy device
AssigneeHamamatsu Photonics K.K.
InventorsTatsuo Dougakiuchi, Akio Ito, Masahiro Hitaka, Tadataka Edamura
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AssigneeHamamatsu Photonics K.K.
InventorsTatsuo Dougakiuchi, Akio Ito, Masahiro Hitaka, Tadataka Edamura
Estimating the term…
A photodetector includes: a semiconductor substrate; a mesa portion formed on a major surface of the semiconductor substrate to extend along an optical waveguide direction; a first contact layer; a second contact layer; a first electrode; and an air bridge wiring electrically connected to the first contact layer and the first electrode. When viewed in a direction perpendicular to the major surface of the semiconductor substrate, a length of the mesa portion in the optical waveguide direction is longer than a length of the mesa portion in a direction perpendicular to the optical waveguide direction. The air bridge wiring is led out from the first contact layer to one side in the direction perpendicular to the optical waveguide direction, and is bridged between the first contact layer and the first electrode.
A photodetector comprising:
Dependencies are inferred from the claim text.