Cryopump

A cryopump comprising:

• a cryopump container including a cryopump intake port;
• a radiation shield that is cooled to a first cooling temperature and extends from the cryopump intake port into the cryopump container;
• a cryopanel unit that is cooled to a second cooling temperature lower than the first cooling temperature and is disposed to be surrounded by the radiation shield in the cryopump container;
• and
• an intake port shield that is cooled to the first cooling temperature and is disposed at the cryopump intake port such that the cryopanel unit is not visible from outside of the cryopump, wherein
• the radiation shield includes a first gas inlet formed at a height between the intake port shield and the cryopanel unit,
• the cryopump container includes a container bottom portion opposite to the cryopump intake port,
• the cryopanel unit includes a plurality of cryopanels arranged in an axial direction of the cryopump from the cryopump intake port toward the container bottom portion,
• the plurality of cryopanels include a top cryopanel that is disposed closest to the cryopump intake port in the axial direction of the cryopump to face a back surface of the intake port shield,
• the intake port shield is coupled to the radiation shield to completely close an end portion opening of the radiation shield on a cryopump intake port side, and
• the intake port shield does not have any gas inlet opening.