Apparatus for plating and method of manufacturing apparatus for plating
AssigneeEbara Corporation
InventorMasaki Tomita
Life of this patent
Estimating the term…
Abstract
One object of the present disclosure is to facilitate maintenance of components placed in a lower portion of a face down-type apparatus for plating. There is provided an apparatus for plating, comprising: a plating tank configured to store a plating solution therein; a substrate holder configured to hold a substrate in such a state that a plating surface of the substrate faces down; and a drawer unit mounted to the plating tank to be freely drawable in a horizontal direction and provided with an anode that is placed to be opposed to the substrate in the plating tank and with a variable anode mask that includes an opening which the anode is exposed from and that is configured to adjust an opening size of the opening.
Claims13
An apparatus for plating, comprising:
- a plating tank configured to store a plating solution therein;
- a substrate holder configured to hold a substrate in such a state that a plating surface of the substrate faces down;
- a drawer unit mounted to the plating tank to be freely drawable in a horizontal direction and provided with an anode that is placed to be opposed to the substrate in the plating tank and with a variable anode mask that includes an opening which the anode is exposed from and that is configured to adjust an opening size of the opening;
- and
- an actuator placed on a plating tank side and provided with an output shaft to be freely movable forward and backward, wherein
- the variable anode mask comprises an opening adjustment member configured to adjust the opening size of the opening, and
- the drawer unit further comprises a drive shaft configured to move the opening adjustment member of the variable anode mask, wherein
- the drive shaft of the drawer unit is connected with the output shaft of the actuator in a detachable manner, outside of the plating tank, and power of the actuator is transmitted to the drive shaft of the drawer unit.
A method of manufacturing an apparatus for plating, the method comprising:
- providing a plating tank;
- inserting a drawer unit comprising at least a bottom plate configured to hold an anode and a variable anode mask, a front plate provided to form part of a side wall of the plating tank, and a drive shaft pierced through the front plate and configured to drive the variable anode mask, into the plating tank;
- mounting an actuator to an outer face of the side wall of the plating tank at a location other than the front plate;
- and
- connecting the drive shaft of the drawer unit with an output shaft of the actuator in a detachable manner, outside of the plating tank.
Dependencies are inferred from the claim text.