Stage for heating and cooling object
AssigneeAdvantec Co., Ltd.
InventorYuji Masuda
Life of this patent
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Abstract
A stage for heating and cooling an object installed in a chamber 1 includes : a stage body 5, 6 that has a mounting surface on which an object is mounted; a heating unit 7 for heating the mounting surface; and a cooling unit 8 for cooling the mounting surface. The stage body 5, 6 also has a first groove 10 into which the heating unit is inserted and a second groove 10 into which the cooling unit is inserted. The gap between the first groove and the heating unit and the gap between the second groove and the cooling unit have a heat-conductive medium.
Claims5
A stage which is configured to be installed inside a chamber for heating or cooling an object, the stage comprising:
- a stage body having a mounting surface on which the object is mounted;
- a heating unit;
- and
- a cooling unit,
- wherein the stage body further comprises:
- a first groove into which the heating unit is inserted;
- and
- a second groove into which the cooling unit is inserted,
- wherein a heat-conductive medium is provided in a first gap between the first groove and the heating unit as well as in a second gap between the second groove and the cooling unit,
- wherein the heat-conductive medium is a helium gas having a pressure of from 0.1 atmospheres to 100 atmospheres, both inclusive, and
- wherein each of the first gap and the second gap is a hermetically sealed space isolated from an external atmosphere outside the stage, and the heat-conductive medium is contained within each of the first gap and the second gap.
Dependencies are inferred from the claim text.